Quebec tender · Avis d’appel d’offres
Acquisition d’un système automatisé comprenant un graveur ICP à sec et une chambre de décapage de résine pour des tranches de 200 mm
Reference number: C2MI-009446
Issuing organization: Centre de Collaboration MiQro Innovation (C2MI)
Location: Montérégie
Published: 2026-07-09
Closing date: 2026-08-04
Tender details
Centre de Collaboration MiQro Innovation (C2MI) has issued a tender in Montérégie for an automated 200 mm ICP dry etcher and resin stripping chamber. The equipment will be installed in the cleanroom and used for processing silicon, sapphire, and other substrates for quantum-device manufacturing.